High-vacuum Rectangular Gate Valves

The high-vacuum rectangular transfer valve employs advanced linkage-drive technology to ensure smooth and efficient valve operation. The valve body is precisely engineered with optimized dimensions, resulting in a compact overall structure that saves installation space while maintaining reliable system performance. All moving components are positioned on the atmospheric side, which effectively minimizes particle generation on the vacuum side. This not only helps maintain the cleanliness of the high-vacuum environment but also significantly extends the valve’s service life. In addition, the valve offers several key advantages: when the pressure drops, the valve-disc seals automatically lock, ensuring that sealing performance remains unaffected and thereby enhancing safety and stability. From a maintenance perspective, the straightforward and intuitive design facilitates easy disassembly and inspection, substantially reducing the complexity and time required for routine upkeep.

Product Features 
The high-vacuum rectangular transfer valve employs advanced linkage-drive technology to ensure smooth and efficient valve operation. The valve body is precisely engineered with optimized dimensions, resulting in a compact overall structure that saves installation space while maintaining reliable system performance. All moving components are positioned on the atmospheric side, which effectively minimizes particle generation on the vacuum side. This not only helps maintain the cleanliness of the high-vacuum environment but also significantly extends the valve’s service life. In addition, the valve offers several key advantages: when the pressure drops, the valve-disc seals automatically lock, ensuring that sealing performance remains unaffected and thereby enhancing safety and stability. From a maintenance perspective, the straightforward and intuitive design facilitates easy disassembly and inspection, substantially reducing the complexity and time required for routine upkeep. 
Application Scenarios 
Vacuum rectangular transfer valves, as critical vacuum isolation devices, are widely used in coating equipment for semiconductor manufacturing and the optoelectronics industry. These valves are typically installed at several key locations, including the inlet and outlet of the load-lock chamber, the connection between the load-lock chamber and the transfer chamber, and the interface between the transfer chamber and the process chamber. With this configuration, vacuum rectangular transfer valves not only enable efficient and reliable transfer of materials between different vacuum environments but also effectively isolate individual process chambers, preventing cross-contamination and ensuring process purity and stability. This, in turn, enhances overall equipment performance and improves product yield.