The CCD series electric ultra-high vacuum plug-in valve uses the screw to electrically push the sealing shaft (rod) to move axially and push (pull) the lifting mechanism to drive the driving body to move axially. When the positioning plate moves to the stop block, the sealing The pressure plate and the support plate stop moving axially, and the steel ball lying in the ball socket of the sealing pressure plate and the support plate is pushed out of the ball socket by the driving body, so that the support plate and the sealing pressure plate are away from the driving body and pressed against the supporting surface of the valve flange And the sealing surface, when the steel ball completely leaves the ball socket and is on the plane of the support plate and the sealing pressure plate, the pressing force reaches the maximum, and the valve is completely closed. When the driving body is pulled to move backward, due to the sealing pressure plate and the support plate The friction between the flange surface and the flange surface is very large, the steel ball is pulled back to the ball socket by the driving body, the sealing pressure plate and the support plate are pressed to the driving body under the action of the central spring, and move backward together with the driving body to leave the flange orifice , so that the valve is fully open. The applicable working medium is clean air and non-corrosive gas.

The CCD series electric ultra-high vacuum plug-in valve uses the screw to electrically push the sealing shaft (rod) to move axially and push (pull) the lifting mechanism to drive the driving body to move axially. When the positioning plate moves to the stop block, the sealing The pressure plate and the support plate stop moving axially, and the steel ball lying in the ball socket of the sealing pressure plate and the support plate is pushed out of the ball socket by the driving body, so that the support plate and the sealing pressure plate are away from the driving body and pressed against the supporting surface of the valve flange And the sealing surface, when the steel ball completely leaves the ball socket and is on the plane of the support plate and the sealing pressure plate, the pressing force reaches the maximum, and the valve is completely closed. When the driving body is pulled to move backward, due to the sealing pressure plate and the support plate The friction between the flange surface and the flange surface is very large, the steel ball is pulled back to the ball socket by the driving body, the sealing pressure plate and the support plate are pressed to the driving body under the action of the central spring, and move backward together with the driving body to leave the flange orifice , so that the valve is fully open. The applicable working medium is clean air and non-corrosive gas.