Vacuum Knowledge | How to Protect Molecular Pumps Well?

Release time:

2023.03.25

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1. The molecular pump cannot exceed the usage environment and scope specified by the manufacturer.

1. The molecular pump cannot exceed the usage environment and scope specified by the manufacturer.
2. The high vacuum end of the molecular pump should be protected to avoid direct damage to the pump due to exposure to the atmosphere during operation.
3. The pressure of the front stage (low vacuum end) of the molecular pump exceeds the maximum pressure specified by the manufacturer, which will cause overheating of the pump, damage to the bearings, and in severe cases, even complete failure.
4. Avoid the "dead connections" between the inlet and outlet of the molecular pump. If the previous stage pipeline is fixed, the pump casing cannot expand after being heated, resulting in improper material stress. In this fixed connection, the rotor cannot move freely, and the remaining minor imbalance over time can cause bearing failure and damage to the rotor.
5. When it is impossible to prevent particles from passing through the protective cover of the inlet of the molecular pump and falling into the molecular pump, it is necessary to choose inverted installation or other angles for installation. For processes with a tendency to form sediment, such as in CVD (Chemical Vapor Deposition), the coating process will continue on the rotor and shell components, which will cause imbalance and vibration, causing the rotor to break. In such processes, shielding measures should be taken.
6. When baking the pump, it is essential to comply with the maximum baking temperature requirements specified by the manufacturer. When the temperature is high, it is necessary to cool the pump.
7. The magnetic field will generate eddy currents on the rotor of the running molecular pump, which will heat the rotor and cause it to quickly overheat. If these values are too high, the pump must be shielded. If the distribution of the magnetic field is known, it must be redeployed.
8. In the presence of neutron and gamma radiation of different intensities and durations, this radiation damages the electronic driver and frequency converter installed on the pump. In this case, the electronic driver must be installed at a safe distance away from the radiation using connecting cables.
9. Maintain the molecular pump according to the manufacturer's regulations.

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